ASM 02-195851-01 ASSY-CA-P3 TO HEATER E3 SHEET 1
ASM 02-195849-01 Assembly Cable-TB5-E1.3 Rev.D
ASM 02-195848-01 Assembly Cable-TB5-E1.2
ASM 02-195847-01 Assembly Cable-TB5-E1.1
ASM 02-195706-01 ASSY-CA-A36/A48-PC402
ASM 02-195701-01 Assembly Cable PV950 J950
ASM 02-195700-01 Assembly Cable A12 K602
ASM 02-195699-01 Assembly Cable A12 K303
ASM 02-195698-01 Assembly Cable A12 K103
ASM 02-195558-01 ASSY-CA-A48/A37-PC451
ASM 02-195553-01 Assembly Cable A31 TE901 Rev.D
ASM 02-195538-01 Assembly Cable A44 TE561
ASM 02-195537-01 Assembly Cable A43 TE707 Rev.F
ASM 02-195536-01 Assembly Cable A43 TE705
ASM 02-195535-01 Assembly Cable A43 TE703
ASM 02-195534-01 Assembly Cable A43 TE701 Rev.D
ASM 02-195533-01 Assembly Cable A42 TE603 Rev.E
ASM 02-195531-01 Assembly Cable A42 TE503 Rev.D
ASM 02-195527-01 Assembly Cable A41 TE103
ASM 02-195526-01 Assembly Cable A41 TE101 Rev.D
ASM 02-195515-01 Assembly Cable A16 A7 Rev.D
ASM 02-195511-01 Assembly Cable A16 A5
ASM 02-195507-01 Assembly Cable INP Model A16 to R Rev.C
ASM 02-195505-01 Assembly Cable Input Modual A16 to RCR Rev.C
ASM 02-195503-01 Assembly Cable INP MODL A16 to R Rev.D
ASM 02-195470-01 ASSY-CA EMERALD TO XO3 ODS J400
ASM 02-195449-01 Assembly Cable TB4 to Light 2 RI Rev.D
ASM 02-195448-01 Assembly Cable TB4 to Light 1 LE Rev.D
ASM 02-195447-01 Assembly Cable TB4 TOP Module Controller Rev.C
ASM 02-195445-01 Assembly Cable TB5 E900
ASM 02-195438-01 Assembly Cable-TB5-E2
ASM 02-195436-01 Assembly Cable TB5-E701 Rev.C
ASM 02-195435-01 Assembly Cable TB5-E700
ASM 02-195434-01 Assembly Cable TB5 E703 Rev.C
ASM 02-195433-01 Assembly Cable TB5-E702
ASM 02-195432-01 Assembly Cable TB5 E560
ASM 02-195431-01 Assembly Cable TB5-E601
ASM 02-195430-01 Assembly Cable TB5 E600
ASM 02-195429-01 Assembly Cable TB5-E501
ASM 02-195428-01 Assembly Cable TB5-E500
ASM 02-195424-01 Assembly Cable TB5 to Matching Controller
ASM 02-195250-01 ASSY-CA-DUAL EMERALD SIGNAL FAC1
ASM 02-194806-01 ASSY-CA A12 TO TMA BLKR LK DETR LS PAN
ASM 02-194774-01 ASSY-CA EV591A TO J15 OF BULK REFILL
ASM 02-194598-01 Assembly Padlock LOTO
ASM 02-194221-01 ASSY-CA A27.2 TE2
ASM 02-193179-01 Assembly Gauge Lift Pin
ASM 02-191397D03 ASSY-CA FACILITY EMO-IO 200MM PM3
ASM 02-190352D01 ASSY-CRUCIBLE QUARTZ
ASM 02-189113D01 ASSY-CA-OPT I/F PNL TO GV INTRLK BD
ASM 02-188998-01 ASSY-MAINT CONTROL PNL-NO LAMP TEST
ASM 02-188922D02 ASSY-CA-EV I/F BD1 TO GAS PR SW (CE)
ASM 02-188922D01 ASSY-CA-EV I/F BD1 TO N2 LOW PR SW (CE)
ASM 02-188828D01 ASSY-ENCL LINE FILTER 50/60HZ E3200
ASM 02-188823D01 ASSY-CA-HARDWARE INTLK TO DC DIST BD
ASM 02-188792D01 ASSY-LEVER-LOWER LAMP BANK
ASM 02-187891-01 Assembly H2 Chassis Modified E3000
ASM 02-187791D01 ASSY VID/TEMP CTR PWR LH PH2
ASM 02-187762D01 ASSY-DYNAMIC PRESSURE REGULATOR-LH
ASM 02-187742U04 PCB Foxboro Rear with EPROM
ASM 02-187742U03 PCB Assembly Foxboro Side with EPROM
ASM 02-187742-01 PCB ASSY-FOXBORO-CTR
ASM 02-187672D01 ASSY-DOOR-LOWER-W/TEMP-LH
ASM 02-187648D06 ASSY-CA-WFR AT REACTOR SNSR 2
ASM 02-187090D01 Assembly CA Center Foxboro to Display
ASM 02-187089D01 Assembly Power Cable CFI to Foxboro
ASM 02-187087D01 Assembly CA Center Foxboro to Keyboard
ASM 02-185735D01 ASSY-DOOR-SIDE-BLOWER-LH
ASM 02-185642D01 Assembly - Door PRCS MDL Right Side w/EMO
ASM 02-184445-01 ASSY-CVR-MAG-CONTAINMENT BOX-PCE
ASM 02-184430-01 OBS Assembly - Fixt - Gate Valve Liquid Cooled
ASM 02-184406-01 ASSY-PWR CABINET DUAL PULSAR
ASM 02-180919B01 ASSY-CABLE 2A1B2 WCF RIGHTPM 1 RCVR
ASM 02-180574D01 Assembly RLL Top Cover
ASM 02-180573D01 Assembly LLL Top Cover
ASM 02-180175-01 ASSY-MTC-P8300-NITRIDE
ASM 02-178690D01 ASSY-CA-MFC17 TO MFC INTFC BOARD
ASM 02-178368D01 ASSY-COVER-PCE
ASM 02-173020C01 ASSY-SPLIT NIPPLE
ASM 02-147684-02 PCB ASSY-FOXBORO-FRONT-W/EPROM/NOVRAM
ASM 02-147541-01 ASSY-CA-BLOWER AIR TEMP SWITCH TO J1
ASM 02-147540-01 ASSY-CA PRCS3 TO BLOWER AIR TEMP CA P1
ASM 02-147187-03 PCB Assembly Foxboro Side with EPROM without VRAM B1279EN
ASM 02-147187-02 PCB Assembly Foxboro FRN
ASM 02-147099-01 ASSY-CA-AFT DOOR SW TO PRCS MOD ATTIC
ASM 02-146800-01 ASSY-PANEL-HCL TEST W/N2 PURGE-RH
ASM 02-146714-01 Assembly Upper Loadlock Enclosure Rev. A
ASM 02-146554-01 Assembly Dolly Gas Module
ASM 02-146250-01 Assembly Lower Loadlock Enclosure
ASM 02-146040-01 ASSY-H2 BYPASS SENSOR
ASM 02-145351-01 ASSY-VALVE-BALL-SS .75 FNPT-MODIFIED
ASM 02-145110-01 ASSY-CA-SMART MOT TO +24V AND MOD CONT
ASM 02-144861-01 ASSY-CA-WHM-PRESS SW-N2 WAND PRESS BRISTOL BABCOCK 506008-649
ASM 02-144860-01 ASSY-CA-WHM-PRESS SW-N2 PRI PRG PRESS 506008-649
ASM 02-144815-01 ASSY-CA-RP TUBE PRESENT SWITCH TO PRCS4 KEYENCE FS-V11P
ASM 02-144534-01 ASSY-CA-CPU ABORT SWITCH
ASM 02-144406-01 ASSY-CA-LAMPS RH FEI
ASM 02-144064-02 ASSY-CA-GAS CAB EVC ENABLE
ASM 02-144064-01 ASSY-CA-GAS CAB EVB ENABLE
ASM 02-144063-01 ASSY-CA-GAS CAB EVA ENABLE
ASM 02-144034-02 ASSY-CA-BLOWER FLOW SWITCH
ASM 02-144014-02 ASSY-CA-BHD TO EXH AIR FLOW SWITCH TURCK FCS-K20-AP8X
ASM 02-144014-01 ASSY-CA-BHD TO PRCS MOD BLOWER AIR FLOW
ASM 02-144014-01 ASSEMBLY-CA-BHD TO PRCS MOD BLOWER AIR FLOW
ASM 02-143930-01 ASSY-CA-H2 BYPASS TO H2 CONTROLLER
ASM 02-143889-01 Assembly PLC TC1
ASM 02-143868-01 ASSY-CASTER TOOL- X EPI
ASM 02-143504-01 ASSY-DR LWR W/DUAL MON & GR SW BOX RH
ASM 02-142992-01 ASSY-CA-TM/SYS CONT BHD TO GAS DET
ASM 02-142758-10 ASSY-CA-RIGHT LOADLOCK WAFER MAPPER OMRON E3L-2RC4
ASM 02-142758-09 ASSY-CA-LEFT LOADLOCK WAFER MAPPER OMRON E3L-2RC4
ASM 02-142758-06 ASSY-CA-PM3 WAFER PRESENT SENSOR RIGHT OMRON E3L-2RC4
ASM 02-142758-05 ASSY-CA-PM3 WAFER PRESENT SENSOR LEFT OMRON E3L-2RC4
ASM 02-142758-02 ASSY-CA-LLL WAFER PRESENT GATE RIGHT OMRON E3L-2RC4
ASM 02-142758-01 ASSY-CA-LLL WAFER PRESENT GATE LEFT OMRON E3L-2RC4
ASM 02-142651-01 ASSY-CA-TM/SYS CONT BHD TO H2 DET
ASM 02-141122-01 ASSY-FRAME-COVER-PM BULKHEAD
ASM 02-140776-01 ASSY-DOOR PRCS LOW NOISE LH
ASM 02-140457-01 ASSY-CA-DC DIST BD-TM I/F BD (02 SENSOR)
ASM 02-140419-01 Cable Hardware Interlink Board to System Interface Board
ASM 02-140413-01 / 207423 ASSY-CA-TM CA ASSY-PRGE PNL PNEU PR SW /Whitman
ASM 02-140410-01 ASSY-CA TM/SYS CONT BHD TO PWR MOD
ASM 02-140408-01 ASSY-CA PWR MOD CT TO TM/SYS CONT BHD
ASM 02-140406-01 ASSY-CA PWR MOD TO TM SYS CONT BHD
ASM 02-140398-04 ASSY-CA-TM/SYS CONT BHD-MFC I/F-LOC-J22
ASM 02-140301U02 Assembly E87 NT Box Programmed ZNUGR-22375-06
ASM 02-140301-02 ASSY-E87 NT BOX-PROGRAMMED
ASM 02-140301-01 / Granite PC-370 ASSY-E87 NT BOX-PROGRAMMED W/LICENSE
ASM /ABL SURSUM 26-125033A01 / C3A CIRCUIT BRKR-3A-1 POLE 277V AC
ASM / VERTA 63-119074A32 / VIP-380 TRANSMITTER- WORKSTATION KVM SPLITTER
ASM / UNIT 54-123498A58 / FC-8100 MFC MASS FLOW CONTROLLER SIH4-100 SCCM-HOV-NO
ASM / UNIT 54-123498A13 / FC-8161 MFC MASS FLOW CONTROLLER H2-20 SLM-HOV-NO
ASM / UNIT 54-123389A85 / FC-1661 MFC MASS FLOW CONTROLLER HCL-20 SLM-HOS-NO
ASM / SWAGELOK C001838A / SS-4BW-VCR-LA BELLOWS SEALED VALVE
ASM / SWAGELOK 50-122938A06 / SS-BN8VCR8-0 VALVE BELLOWS PNEU NO .500 M-VCR
ASM / SWAGELOK 50-108456A71 / 6LV-BNC323P-C VALVE-PSV-3-NO-MODU C
ASM / Swagelok 1129-971-01 / 6LVV-DPMR4-P-0 VALVE-PNEU DIAPH 2 WAY M/M NO
ASM / Swagelok 1070-777-01 / SS-8P6T VALVE-PLUG 1/4 TURN 1/2IN COMP SST
ASM / SWAGELOK 1026-998-01 BODY-VALVE 2WAY NC 1 1/8" C-SEAL HTM UHP
ASM / SWAGELOK 1019-557-01 / 6LVV-MSM-DHE-3-P-C-18333 VALVE-PNEU 2WAY NC 1 1/8
ASM / Swagelok 1016-836-01 / NZ3119 VALVE-PNEU DIAPH HF NO MFF
ASM / Swagelok 1016-834-01 / NV3545 VALVE-PNEU DIAPH HIGH FLOW NC-FMMF
ASM / STEC 54-125252A33 / Z13DWMO MFC Mass Flow Controller H2-200 SLM-NO-AI
ASM / STEC 54-123117A53 / FC-4400MO MFC MASS FLOW CONTROLLER UC-SIH2CL2-500SCCM
ASM / STEC 54-123117A44 / FC-4400MO MFC MASS FLOW CONTROLLER UC-1%GEH4/H2-500
ASM / STEC 54-123117A18 / FC-4500MO MFC MASS FLOW CONTROLLER X-H2-10 SLM-AI
ASM / Square D 47-122930A26 TRANSFORMER-480/208 3KVA 3PH
ASM / SMC 50-108456A93 / NZ4125-0152F-L6 VALVE-PNEU SINGLE SOLENOID/PILOT
ASM / SMC 1080-578-01 / VNC204A-10A-B VALVE-PNEUMATIC 2 WAY NC 3/8 RC
ASM / SMC 1062-642-01 / SYJ5123-5MZ-M5 ASSY-CA-SOLENOID VALVE
ASM / SMC 1029-745-01 / ISE80-DUP008813 ASSY-DIGITAL PRESSURE SWITCH 811MM
ASM / SETRA 02-333876D03 / 3301MZAG7AS1 ASSY-CA MFC BD CA TO SI VENT DSPL
ASM / Qualiflow 54-117817A05 / FC-261 MFC MASS FLOW CONTROLLER H2-20 SLM-NO @
ASM / PureAir 63-119074A30 / STX-PA TRANSMITTER-H2-0-4%
ASM / Prescision Inc 16-404633-01 FLANGE-MESC INTFC-300 MM (XP4-EMERALD)
ASM / Phoenix Contact 44-122035A82 / DEK-REL-24/1/SEN RELAY-TERM BLK 24V AC/DC
ASM / Phoenix Contact 41-123497A28 / UKKB 5 BLOCK-TERMINAL
ASM / Phoenix Contact 41-123497A08 / UKK5-T TERMINAL BLOCK-DBL LVL UKK 5-TG
ASM / Phoenix Contact 1006-038-01 / OTTA 2.5-PE TERMINAL BLOCK-20A GROUND RING L
ASM / Phoenix Contact 1006-037-01 / OTTA 2.5 TERMINAL BLOCK-20A 600V RING LUG 9M
ASM / Parker 61-106247A41 GEAR HEAD NEMA 34 / PX34-003
ASM / Parker 60-122486A29 O-RING 2-223/75 WHITE PAROFLUOR ULTRA / UHP
ASM / MKS 91320-52065 / DMA12TGAEANN633 Pressure Transducer Manometer 13.332 kPa
ASM / MKS 830069798 / 41A-22644 SWITCH PRESS 41D 0.5 Torr
ASM / MKS 830056335 / 51A11TCA2BA005 SWITCH PRESS 5TORR
ASM / MKS 65-106645A90 / 870B12PCB2GT1 Transducer Press W/Disp 0-10V 100PSI
ASM / MKS 65-106645A81 / DMA13TCEEANN633 MANOMETER-1000 TORR DEVICENET 1/2F VCR
ASM / MKS 65-106645A80 / DMA-24921 MANOMETER-1 TORR DEVICENET 1/4M VCR
ASM / MKS 50-125043U30 / 153D-26356 VALVE-EXH THRTL-3.0ID X 5.95OD-REFURB
ASM / MKS 50-123824A67 / 153D-20-40-2 VALVE-THROTTLE CONTROL-KF40
ASM / LINTEC 1033-867-01-R / LM-2000 Liquid Flow Meter PB1 LM
ASM / L-COM 32-123808A47 ASSY-CA-SVGA HD15M/M-50FT
ASM / KLK 16-325607C01 PLATE-BASE TACH MOUNT
ASM / KLK 16-146947-01 COVER-LOWER LAMP 90
ASM / KEYENCE 77-125002A04 / FS-V22RP SENSOR-EXPANSION UNIT-FIBER OPTIC
ASM / KEYENCE 77-106768A12 / FS2-60 SENSOR-FIBER PHOTOELECT-AMPLIFIER
ASM / ITM 830054693 / 138 B-2MM-BI-ITM TOUCH SPLITTER 120 VAC
ASM / HPS Clamp 62-105902A10
ASM / Horiba Stec 845005154 / SEC-4550M MFC Mass Flow Controller 30SLM HCI
ASM / Horiba Stec 830053417 / SEC-4400MC-SUC MFC MASS FLOW CONTROLLER 1SLM H2
ASM / Horiba Stec 830052089 / SEC-4400MC-SUC MFC MASS FLOW CONTROLLER 500SC
ASM / Horiba Stec 830052046 / SEC-4400MC-SUC MFC MASS FLOW CONTROLLER 1SLM NH3
ASM / Fuji 1128-467-01 / BW50RAGU CIRCUIT BREAKER-3P 50A 220V
ASM / Fine Series 830099123 / UG1071A72 VLV PN FBSDAL-6.35UGF-2B3-PA
ASM / FHT Assy-Interlock SOLV 1089-836-01
ASM / FHT 1012-905-01 Assembly Cable Input Module A1
ASM / COSEL 02-188858D01 / R150U-24-N ASSY-POWER SUPPLY ROTATION
ASM / Ceramic 16-401656-01 DUCT-EXHAUST SHD
ASM / CELERITY 54-125027A03 / PSMBD200 MFC MASS FLOW CONTROLLER HE-100 SCCM
ASM / CELERITY 54-123389A89 / FC-1661 MFC MASS FLOW CONTROLLER HCL-3 SLM-HOS-NO
ASM / CELERITY 54-106904A07 / FC-261 MFC MASS FLOW CONTROLLER H2 20 SLM AI
ASM / CELERITY 54-106903A54 / FC-260V-4V MFC MASS FLOW CONTROLLER H2 20
ASM / CELERITY 54-106902A24 / FC-261KZ-4V MFC MASS FLOW CONTROLLER HCL 20
ASM / Bronkhorst 830069372 VALVE PRESS CONTR C9-LZA-99
ASM / Bronkhorst 830066497 CONTR PRESS P-502C-FAC-89P-0
ASM / Bronkhorst 830039511 VALVE PRESS CONTR F004AC-LUA
ASM / Baytek 830065865 / 51-907-00 VIDEOCARD BAYVIEW 72 OS2
ASM / BAUMER 33-123495A02 / IFF 08.15/L1 SWITCH-PROXIMITY RECT NPN 1.5MMDIS
ASM / ANIMATICS 30-106660A88 / SM3430-4.13 MOTOR-SMART-SM3430-4.13-3850 RPM-DC
ASM / aMsp 1030-189-01 / MMAAJFM8398929 KNOB-M4 THUMB PRESS ON BLACK
ASM / Amp-Trap 830067701 / AGT200 FUSE CLASS J 200A TIME DELAY
ASM / AIT 1012-911-03 Assembly Cable E5GN A103TO TE404 Rev.A
ASM / AIT 1012-911-01 Assembly Cable E5GN A101TO TE110 Rev.A
