伺服驅(qū)動(dòng)器是現(xiàn)代運(yùn)動(dòng)控制的重要組成部分，被廣泛應(yīng)用于工業(yè)機(jī)器人及數(shù)控加工中心等自動(dòng)化設(shè)備中。尤其是應(yīng)用于控制交流永磁同步電機(jī)的伺服驅(qū)動(dòng)器已經(jīng)成為國(guó)內(nèi)外研究熱點(diǎn)。當(dāng)前交流伺服驅(qū)動(dòng)器設(shè)計(jì)中普遍采用基于矢量控制的電流、速度、位置3閉環(huán)控制算法。該算法中速度閉環(huán)設(shè)計(jì)合理與否，對(duì)于整個(gè)伺服控制系統(tǒng)，特別是速度控制性能的發(fā)揮起到關(guān)鍵作用APPLIED MATERIALS 3920-00195 INTL, SEMI ANNUAL PM, BR
APPLIED MATERIALS 3920-00224 TOOL TRANSIT LEVELING KIT, IECP
APPLIED MATERIALS 3920-01047 TOOL EXTRACTION 26-18AWG
APPLIED MATERIALS 3920-01052 TOOL CRIMPER 14-16-18AWG 44 SERIES
APPLIED MATERIALS 3920-01071 HEAD TERMINATING MTA-100
APPLIED MATERIALS 3920-01136 ADPTR UNIVERSAL 15 PIN "D" CONNECTOR
APPLIED MATERIALS 3920-01232 TOOL LOCKOUT DBL-POLE BREAKER
APPLIED MATERIALS 3920-01235 DESCO 618 STICKS
APPLIED MATERIALS 3920-01236 TOOL SCREWDRIVER NYLON PENCIL
APPLIED MATERIALS 3920-01254 TOOL LEVELING PAD REID SS WITH 1/8" ELA
APPLIED MATERIALS 3920-01271 TOOL CONTACT PT 1.00"LG 4-48 SCR THD
APPLIED MATERIALS 3920-01284 TOOL LOCKOUT MULTI-POLE BREAKER
APPLIED MATERIALS 3920-01297 TOOL, DRILL BIT 5/8 DIAX
APPLIED MATERIALS 3920-01364 CONTACT POINT TOOL
APPLIED MATERIALS 3920-01387 TOOL SURFACE PLATE 18" X 24"
APPLIED MATERIALS 3920-01496 TOOLB DUSTING ANTI-STATIC
APPLIED MATERIALS 3920-01512 SAFETY,CURTAIN,TRANSMITTER,60",24VD
APPLIED MATERIALS 3920-01540 TOOL TORQUE SCREWDRIVER PRESET @ 20LBF.
APPLIED MATERIALS 3920-01589 WRENCH,FOR #4 BALL PLUNGER
APPLIED MATERIALS 3920-01655 TOOL DIAGNOSTIC FOR CPS1001 RF GEN
APPLIED MATERIALS 3920-90076 TOOL CONTACT EXTRACTION
APPLIED MATERIALS 3921MF03 MAINFRAME, KIT
APPLIED MATERIALS 3930-00016 CNTRL TEMP DUAL 4DIG DSPL RED/GRN 1/16DI
APPLIED MATERIALS 3930-00034 CNTRL TEMP HI LIMIT J/K/RTD, SPDT 3A RLY
APPLIED MATERIALS 3930-00035 CNTRL, TEMP, 24VDC, UNIVERSAL IN, PULSED
APPLIED MATERIALS 3930-01005 VALVE
APPLIED MATERIALS 3930-01005 VALVE
APPLIED MATERIALS 3930-01042 PWR SUP TEMP BOX
APPLIED MATERIALS 3930-01066 CONTROLLER-TC TEMP BOX
APPLIED MATERIALS 3930-01070 CNTRL TEMP 1/16DIN-RED 12-24VAC/CD
APPLIED MATERIALS 3930-50023 I/O,MASTER
APPLIED MATERIALS 3930-90073 CONTROLLER, MOTOR (MCM)
APPLIED MATERIALS 3940-01045 PANEL,FRONT 19" RACK 1-72 H. ANODIZED
APPLIED MATERIALS 3940-01053 FSTNR LATCH PLATE KEEPER SST
APPLIED MATERIALS 3940-01061 FASTNER, RCPT SQ 10-32.075 PNL THK
APPLIED MATERIALS 3950-00009 SPRAY GUN DI W/CUSTOM TEE FITTING,
APPLIED MATERIALS 3950-01043 NOZ SPRAY 60DEG 3/8-24 CERAMIC
APPLIED MATERIALS 3950-01048 SPRAY GUN DI WATER W/RECIRCULATING ASSY
APPLIED MATERIALS 3960-00022 LATCH LEVER, ADJ .04-.95GRIP RAISED TRIGG
APPLIED MATERIALS 3960-00056 LATCH, SLAM ACTION CATCH W/ SWITCH 44N
APPLIED MATERIALS 3960-00067 LATCH PUSH TO CLOSE SIDE-MOUN
APPLIED MATERIALS 3960-01077 LATCH LEVER SEALED .04-.55 GRIP FLUSH MT
APPLIED MATERIALS 3970-00011 GEAR REDUCER 5:1 RATIO
APPLIED MATERIALS 3980-01002 RTNR RING EXT D-TYP 3/16SFT 298ODX.171
APPLIED MATERIALS 3980-01047 RING PEDESTAL TXT TOP 150MM ALUM TSS
APPLIED MATERIALS 3980-01048 RING PEDESTALL TXT BOT 150MM ALUM TSS
APPLIED MATERIALS 3CX3000A7 TUBE, ELECTRON
APPLIED MATERIALS 40-90086 PSU I/P 115/230V O/P 5V 200A
APPLIED MATERIALS 4000-01241 CARDCAGE,INSULATING STRIP
APPLIED MATERIALS 4000-01308 PM PARTS
APPLIED MATERIALS 4000-2000-01 POWER SUPPLY
APPLIED MATERIALS 4020-00030 FILTER, SEALED
APPLIED MATERIALS 4020-00098 FILTER OPTIMIZER (MILLIPORE CBUVOSOF1)
APPLIED MATERIALS 4020-00209 FILTER, QC 1500, 0.05 MICRON, DISPOSABLE, 8MM PILLAR IN/OUT
APPLIED MATERIALS 4020-01019 FILTER, HI-TEMP., HEAT EXCHANG
APPLIED MATERIALS 4020-01024 IN-LINE GAS FILTER
APPLIED MATERIALS 4020-01030 FILTER, IN LINE
APPLIED MATERIALS 4020-01037 FILTER, OIL
APPLIED MATERIALS 4020-01038 FILTER, LOAD CHAMBER, LARGE
APPLIED MATERIALS 4020-01039 FILTER, VENT DIFFUSER
APPLIED MATERIALS 4020-01043 FILTER, OIL VAPOR AF30-60C
APPLIED MATERIALS 4020-01080 FLTR EXEHAUST OIL FEEDBK
APPLIED MATERIALS 4020-01080 FLTR EXEHAUST OIL FEEDBK
APPLIED MATERIALS 4020-01087 FILTER INLET SCREEN ISO-100 RECESSED
APPLIED MATERIALS 4020-01088 FILTER
APPLIED MATERIALS 4020-01104 FILTER CARTRIDGE DI
APPLIED MATERIALS 4020-01133 INLINE,GAS,FILTER
APPLIED MATERIALS 4020-01159 FLTR INLINE GAS 2500PSIG 1/4VCR-M 30SCPM
APPLIED MATERIALS 4020-01179 FLTR IN-LINE GAS 1000 PSIG 1/4VCR M 75SL
APPLIED MATERIALS 4020-01182 CARTRIDGE,DI (D8809)
APPLIED MATERIALS 4020-01184 CHILLER P.I. CARTRIDGE
APPLIED MATERIALS 4020-01200 FLTR IN-LINE GAS 3750PSI G 1/4VCR-M 5SLM
APPLIED MATERIALS 4020-01204 FLTR IN-LINE GAS 3000PSI 1/4VCR-M 100SL
APPLIED MATERIALS 4020-01283 FILTER IN-LINE GAS 1/2 VCR MM 120SLM 5RA (MILLIPORE CORP WG3NS2R
APPLIED MATERIALS 4020-01308 FILTER STRAINER
APPLIED MATERIALS 4020-01323 FLTR IN-LINE N2 1/4VCR 40SLM
APPLIED MATERIALS 4020-01329 FILTER,AIR,MEG,PUMP
APPLIED MATERIALS 4020-01377 PCA DI FLOW MODULE AMAT
APPLIED MATERIALS 4020-01418 FLTR FLOW METER TUBING
APPLIED MATERIALS 4020-90002 FILTER T-LINE GAS
APPLIED MATERIALS 4020-90004 FILTER 60 MICRON TEE TYPE SST SWGLCK
APPLIED MATERIALS 4020-90004 FILTER 60 MICRON TEE TYPE SST SWGLCK
APPLIED MATERIALS 4020-90014 FILTER
APPLIED MATERIALS 4020-90027 IN-LINE FILTER 0.5MM
APPLIED MATERIALS 4020-90035 FILTER CARTRIDGE 4A, OL SLEEVE
APPLIED MATERIALS 4020-90043 FILTER, EXHAUST FOR D40BCS
APPLIED MATERIALS 4020-90082 FILTER,INLINE,1/4,VCR-MAL
APPLIED MATERIALS 4020-90083 FILTER
APPLIED MATERIALS 4020-90088 FILTER, CONICAL, 1/4" O/D PIPE
APPLIED MATERIALS 4020-98001 FILTER 1/4 MALE VCR PTFE/SS
APPLIED MATERIALS 4020-99000 FILTER, ELEMENT AL203
APPLIED MATERIALS 4020-99001 FILTER, ELEMENT COMBINATION
APPLIED MATERIALS 4030-01005 SPRKT TMG BELT
APPLIED MATERIALS 4040-01023 PLUNGER STUBBY 5/8-11 1.25-5LBS NON-LKG W/P
APPLIED MATERIALS 4060-00026 MANF BASE BLOCK
APPLIED MATERIALS 4060-00052 MANF ASSY VALVE 16-STATION
APPLIED MATERIALS 4060-00068 MANF ASSY PNEU 8STATION VQ1000 DNET
APPLIED MATERIALS 4060-00171 MANIF ASSY 1670, 14-3/2VLVS, 1-5 13VALVE
APPLIED MATERIALS 4060-00172 MANF, ASSY 1671 10-3/2 VLVS, 3-5/3 VALVE
APPLIED MATERIALS 4060-00421 4 WAY VALVE, 24VDC
APPLIED MATERIALS 4060-00504 MANF ASSY CHEM SUPPLY 1/4OR S-300 BLEND
APPLIED MATERIALS 4060-01026 MANF PART 14 STA 1/8 NPT INLAL 10-32 POR
APPLIED MATERIALS 4060-01096 MANF VACUUM VALVE PNEUMATIC
APPLIED MATERIALS 4060-01098 MANF PNEU PRESS DUAL CONTR/DISTRIB 180P
APPLIED MATERIALS 4060-01103 MANF PNEU PRESS SGL CNTRL/DISTRIB 180PS
APPLIED MATERIALS 4060-01144 PCA CHEM FLOW MODULE AMAT
APPLIED MATERIALS 4060-01157 MANF ASSY PNEU 8STATION
APPLIED MATERIALS 4060-01162 MANF 4PORTS 1/4NPT 3/8NPT-END-PORTS ALU
APPLIED MATERIALS 4200174 AUTOFOCUS PH-II ASSY
APPLIED MATERIALS 4200359W FOCUS OFFSET GEAR PH1 ASSY
APPLIED MATERIALS 421-65 SPRAY GUN WITH RECIRU
APPLIED MATERIALS 422-47-010 C00LING
APPLIED MATERIALS 422-57-020 SCREEN, COOLING, TOWER
APPLIED MATERIALS 423-62-005 DRAIN LINE, INCONEL 1,1/2 KF-40
APPLIED MATERIALS 425-58-004 LOWER PACKING CARTRIDGE
APPLIED MATERIALS 425-59-009 DEMISTER SCREEN
APPLIED MATERIALS 427-10036-00 863 DI CART D0803
APPLIED MATERIALS 4315-0020 HEAT SHIELD, NW40
APPLIED MATERIALS 45300297 PRESSURE VALVE
APPLIED MATERIALS 460-00144-00 GASKET INLET 860/861
APPLIED MATERIALS 4S007-003 PCB, R. ALIGN (NIKON)
APPLIED MATERIALS 4x170CR 4x170 GATE VALVE POLY
APPLIED MATERIALS 50-8V-NI-R GASKET
APPLIED MATERIALS 5010-00005 ADH EPOXY SCOTCH
APPLIED MATERIALS 5010-00008 .625 HYDROPHILIC POLYUROTHAN
APPLIED MATERIALS 5010-01003 ADH RTV SILICON RUBBER
APPLIED MATERIALS 5010-01010 COOL FLUID HEAT TRANS. FLUOR
APPLIED MATERIALS 5070-01009 SEAL, DISC ASSY. 3"
APPLIED MATERIALS 5075-90118 CLEANER FEFILL KIT
APPLIED MATERIALS 51A13TCA2BA640 BARATRON PRESSURE SWITCH
APPLIED MATERIALS 52-0166-001 BUSHING, PREDESTAL
APPLIED MATERIALS 52-0434-002 INSERT, INJECT 3 ZO
APPLIED MATERIALS 52-35179-00 SWITCH, PUSH BUTTON
APPLIED MATERIALS 52-35191-00 SWITCH, MICRO HOIST
APPLIED MATERIALS 5200HT REMOTE POWER SUPPLY RACK
APPLIED MATERIALS 542-16-007 BOLT
APPLIED MATERIALS 552-02-011 REGULATOR, PRESSURE 5 PSI
APPLIED MATERIALS 553-32-001 CYLINDER 2IN DBL ACTING RCCM
APPLIED MATERIALS 57-60014-00 HEATER, BASE PLATE 115VAC
APPLIED MATERIALS 57-60015-00 HEATER, 115V 36W
APPLIED MATERIALS 57-60016-00 HEATER BASE PLATE 115VAC
APPLIED MATERIALS 57-60017-00 HEATER, BASE PLATE 115VAC
APPLIED MATERIALS 58-35029-00 MOTOR, HOIST FRAME F6C
APPLIED MATERIALS 595-08-001 ELBOW 1/2IN X 1/12IN FNPT INCONEL
APPLIED MATERIALS 600050-01 PCB SVG VERT. FURN. CPU PROCESS CONTROL
APPLIED MATERIALS 600652 EMV 101-314
APPLIED MATERIALS 600653 BMV 101-25
APPLIED MATERIALS 600875 TUBE, FLOWMETER TYPE 25
APPLIED MATERIALS 601053 TEFLON SEAL
APPLIED MATERIALS 6021-70254 PLATE,THROTTLE VALVE
APPLIED MATERIALS 602574 BELLOWS WELD ASSY
APPLIED MATERIALS 602592 AFC, 3SLM H2, NON-AMMONIA
APPLIED MATERIALS 602595 AFC, 50SLM H2 NON-AMMONIA SERVICE
APPLIED MATERIALS 602599 AFC,1SLM N2,NON-NH4
APPLIED MATERIALS 602601D AFC-550EB
APPLIED MATERIALS 602605 FITTING KIT,1/4VCR
APPLIED MATERIALS 605-067-SM-W BUSHING, COIL SUPPO
APPLIED MATERIALS 61-10162-00 CIRCUIT BREAKER, 40A 2P
APPLIED MATERIALS 61-10180-00 CIRCUIT BREAKER 10AMP
APPLIED MATERIALS 61-10182-00 CIRCUIT BREAKER, 10A 2P
APPLIED MATERIALS 61-10190-00 SWITCH AUX INTERLOCK
APPLIED MATERIALS 61-30069-00 CIRCUIT BREAKER 25AMP
APPLIED MATERIALS 64-81729-00 PRINT WIRING BD
APPLIED MATERIALS 64-81751-00 PCB, SENSOR
APPLIED MATERIALS 642902 DETECTOR MOD CONDUIT H2
APPLIED MATERIALS 644-0508-005 PCB A702/A802, BY PERKIN ELMER
APPLIED MATERIALS 644-0771-002 PCB A11, BY PERKIN ELMER
APPLIED MATERIALS 644-0776-001 PCB A12, BY PERKIN ELMER
APPLIED MATERIALS 644-0780-004 PCB A13, BY PERKIN ELMER
APPLIED MATERIALS 644-0958-002 PCB, (PERKIN ELMER)
APPLIED MATERIALS 644-0963-007 PCB A6, BY PERKIN ELMER
APPLIED MATERIALS 644-0966-001 PCB A18, BY PERKIN ELMER
APPLIED MATERIALS 644-0980-013 PCB, A3 (PERKIN ELMER)
APPLIED MATERIALS 645136 VALVE, PNEUMATIC 3-WAY
APPLIED MATERIALS 6470-23004 PCB
APPLIED MATERIALS 647065 TRACK, CHAIN
APPLIED MATERIALS 647080 SEAL
APPLIED MATERIALS 648125 FITTING ASSY, PLENUM
APPLIED MATERIALS 65-0251-030 AIR CARD, PNUE PCB ASSY
APPLIED MATERIALS 650112 SPACER, RF FEEDTHRU
APPLIED MATERIALS 650143 SPROCKET, MAGNET DRIVE
APPLIED MATERIALS 650155 SHAFT, MAGNET DRIVE
APPLIED MATERIALS 650620 SUSCEPTOR, 3" ANODIZED
APPLIED MATERIALS 650653 CABLE, RF OUTPUT
APPLIED MATERIALS 650793 LENS PROTECTOR
APPLIED MATERIALS 650884 SUSCEPTOR, 5" ANODIZED
APPLIED MATERIALS 650996 SUSCEPTOR, 3" ANODIZED
APPLIED MATERIALS 651019 PERFORATED PLATE
APPLIED MATERIALS 6588 SCREW, CRYO TURBO
APPLIED MATERIALS 670000 ASSY ELECTRO VALVE PANEL
APPLIED MATERIALS 670044 SHAFT EXTENSION
APPLIED MATERIALS 670054 PCB, SLAVE CPU
APPLIED MATERIALS 670222 LINE, RIGHT INJECT
APPLIED MATERIALS 670265 BRACKET, REGULATOR MOUNT
APPLIED MATERIALS 670288 BRACKET,AFC MOUNT
APPLIED MATERIALS 670307 LAMP MODULE PANEL
APPLIED MATERIALS 670308 LAMP MODULE PANEL, 3
APPLIED MATERIALS 670309 LAMP MODULE PANEL #4
APPLIED MATERIALS 670333 LINE, LEFT INJECT, TABLE TOP RUN
APPLIED MATERIALS 670368 RADIATION SHIELD ASSY
APPLIED MATERIALS 670402 TRANSFORMER,BU
APPLIED MATERIALS 670423 HUB GEAR
APPLIED MATERIALS 670480 COLLAR QUARTZ HANGER
APPLIED MATERIALS 670556 LINE, FORELINE PURGE
APPLIED MATERIALS 670703 RING, GEAR MOUNTING
APPLIED MATERIALS 670711 SEAL NUT,ROTATION DRIVE
APPLIED MATERIALS 670713 PIN
APPLIED MATERIALS 670728 LINE, PRESSURE SENSING
APPLIED MATERIALS 670776 PCB, UNIVERSAL ADDRESS BUS, AMAT
APPLIED MATERIALS 670858 LINE,CENTER PURGE
APPLIED MATERIALS 670938 KIT,REFURB,GATE VALVE
APPLIED MATERIALS 671040 MANIFOLD, MAIN
APPLIED MATERIALS 672530 PCB, ALPHANUMERIC DISPLAY
APPLIED MATERIALS 673005 FILTER ASSY
