Edwards愛德華STP-301C設(shè)備泵保養(yǎng),精工精機(jī)STP-301分子泵維修,Seiko Seiki STP-301/STP-301C日本精工精機(jī)分子泵進(jìn)氣法蘭口ICF152/VG100/ISO100,出氣法蘭口KF25,抽速可達(dá)到300L/s,轉(zhuǎn)速為48000rpm,VG/ISO法蘭口極限壓力6.5x10-6Pa (5x10-8Torr),ICF法蘭口極限壓力10-7Pa (10-9Torr),精工精機(jī)STP-H301C分子泵對(duì)應(yīng)的控制器為:Seiko Seiki SCU-H301C