普發(fā)TMU521PN真空渦輪分子泵保養(yǎng),Pfeiffer 普發(fā)TMU521PC分子泵維修,Pfeiffer TMU521YPN普發(fā)渦輪分子泵進氣法蘭口DN 100 CF-F/DN 160 CF-F,出氣法蘭口 DN 25 ISO-KF,DN 100 CF-F抽速可達到290 L/s, DN 160 CF-F抽速可達到510 L/s,833HZ轉(zhuǎn)速為50000 rpm,550HZ轉(zhuǎn)速為33000 rpm,極限真空5X10-10 mbar, Pfeiffer普發(fā)TMU521分子泵對應的控制器為:Pfeiffer TC600等